Confocal Displacement Sensor

CL-3000 series

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光学单元(Compact ø8・Quad type・Export Control Products)CL-L007G

Specifications

Model

CL-L007G*1

Type

光学单元

Head

CL-L007*1

Reference distance

7 mm0.28 "

Reference measurement range

Measurement range

±1.5 mm±0.06 "

Linearity

±1.95 µm±0.000077 "*2

High precision measurement range

Measurement range

±0.5 mm±0.02 "

Linearity

±0.78 µm±0.000031 "*2

Resolution

0.015 µm*3

Spot diameter

ø 750 µmø 0.0295 "

Laser class

光学单元

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50 °C32 to 122 °F

相对湿度

20 % RH to 85 % RH (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm0.06 "; 2 hours each for X, Y, and Z axes

光学单元

10 to 57 Hz, double amplitude 0.3 mm0.01 "; 2 hours each for X, Y, and Z axes

Shock resistance

15 G 6 ms

Temperature characteristic

Head

0.005 % of F.S./°C

光学单元

0.015 % of F.S./°C

Material

Head

SUS

光学单元

Polycarbonate

Weight

Head

Approx. 140 g

光学单元

Approx. 1,600 g

*1Sensor head and optical unit are a matched pair. Not cross compatible.
*2Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface) .
*3Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface) .

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