3D Interference Measurement Sensor
WI-5000 series
Sensor head High-resolution modelWI-001
Specifications
Model |
WI-001*1*2*3 |
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Reference distance |
18 mm0.71" |
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Measurement range |
Z |
1.4 mm0.06"(Standard Mode), 0.7 mm0.03"(High Speed Mode) |
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XY |
1×1毫米0.04" × 0.04" |
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Minimum detection area |
4 × 4 µm0.000157" × 0.000157" |
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Repeatability (height difference) |
0.1 µm0.000004“*4 |
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Linearity (height difference) |
±2.8 µm0.000110"(±0.2% of F.S., F.S. = 1.4 mm0.06", +20 to +30°C+68 to +86°F)*5 |
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Light source for measurement |
Type |
Infrared SLD |
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Center wavelength |
830 nm |
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Laser class (IEC60825-1) |
Class 3R |
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Output |
3.6 mW |
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Guide light source |
Type |
Red semiconductor laser |
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Wavelength |
660 nm |
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Laser class (IEC60825-1) |
Class 1 |
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Output |
0.15 mW |
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Sampling frequency |
内部触发 |
133 ms (High Speed Mode), 266 ms (Standard Mode) |
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External Trigger |
266 ms max. (High Speed Mode), 532 ms max. (Standard Mode)*6 |
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Environmental resistance |
Ambient light |
白炽灯/荧光灯:5,000勒克斯最多。 |
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Ambient temperature |
0 to +35 °C32到95°F |
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相对湿度 |
20 to 85 % RH (No condensation) |
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Weight |
Approx. 3,000 g |
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*1The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.The resolution of the height (distance from head reference plane to measurement workpiece) is 1 µm(*2). |