3D Surface Profiler
VK-X3000 series
Measurement headVK-X3100
Specifications
Model |
VK-X3100 |
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Type |
Measurement head |
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Total magnification |
42 to 28800×*1 |
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Field of view |
11 to 7398 μm |
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Measurement principle |
以激光照射r confocal, Focus variation, White light interferometry, Spectral interference |
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以激光照射r wavelength |
Semiconductor laser, 404 nm |
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Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
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Max. laser output |
0.9 mW |
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以激光照射r class |
Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
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以激光照射r light-receiving element |
16-bit photomultiplier |
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White light source |
White LED |
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White-light-receiving element |
High-definition color CMOS |
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以激光照射r confocal |
Height display resolution |
0.1 nm |
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Height repeatability σ |
10×: 100 nm, 20×: 40 nm, 50×: 12 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
0.1 nm |
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Width repeatability 3σ |
10×: 200 nm, 20×: 100 nm, 50×: 40 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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Focus variation |
Height display resolution |
0.1 nm |
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Height repeatability σ |
5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
0.1 nm |
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Width repeatability 3σ |
5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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White light interferometry |
Height display resolution |
0.01 nm |
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Width display resolution |
0.1 nm |
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Surface topography repeatability |
0.08 nm*5 |
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Repeatability of RMS |
0.008 nm*5 |
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Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
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Accuracy |
±0.6%*5 |
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Optical observation |
Number of pixels |
5.6 million |
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Revolver |
6-hole electric revolver |
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Ring illumination lens |
2.5×, 5×, 10× |
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Optical zoom |
1 to 8× |
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XY stage configuration |
Manual operation range |
70 × 70 mm2.76” × 2.76” |
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Motorized operation range |
100 × 100 mm3.94” × 3.94” |
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Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
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Power consumption |
150 VA |
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Environmental resistance |
Ambient temperature |
+15 to 28°C59 to 82.4°F |
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相对湿度 |
20 to 80% RH (No condensation) |
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Weight |
Approx. 13 kg |
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*1When using a 23-inch full-screen display. |